Planning

Week Mon. 28 Tue. 29 Wed. 30 Thu. 01 Fri. 02 List

	Mon. 28	Tue. 29	Wed. 30	Thu. 01	Fri. 02
08:00 09:00 10:00 11:00 12:00 13:00 14:00 15:00 16:00 17:00 18:00 19:00	Micro-nanotechnology school Day 1 Welcome coffee 8:00 - 8:30 (30min) Micro-nanotechnology school Day 1 Welcome coffee Lithography I (UV lithography, direct writing, masks) 8:30 - 9:20 (50min) Lithography I (UV lithography, direct writing, masks) Amphi JJ Gagnepain, FEMTO-ST Guillaume Jutzi, FEMTO-ST Lithography II (two photon lithography): MPO 100, a multi-user tool for 3D lithography and 3D microprinting 9:20 - 10:10 (50min) Lithography II (two photon lithography): MPO 100, a multi-user tool for 3D lithography and 3D microprinting Amphi JJ Gagnepain, FEMTO-ST S. Kohlhaas, Heidelberg Instruments / Multiphoton Optics Coffee break 10:10 - 10:30 (20min) Coffee break Wet etching and RIE 10:30 - 11:20 (50min) Wet etching and RIE Amphi JJ Gagnepain, FEMTO-ST Djaffar Belharet, FEMTO-ST Microstructuring of glass (wet and dry etching, direct and assited femtosecond laser processing, micromolding) 11:20 - 12:10 (50min) Microstructuring of glass (wet and dry etching, direct and assited femtosecond laser processing, micromolding) Amphi JJ Gagnepain, FEMTO-ST Sylwester Bargiel, FEMTO-ST Lunch 12:10 - 13:30 (1h20) Lunch Introduction to the clean room environment 13:30 - 14:00 (30min) Introduction to the clean room environment Amphi JJ Gagnepain, FEMTO-ST Samuel Queste, FEMTO-ST Demonstration I 14:00 - 16:00 (2h) Demonstration I Cleanroom MIMENTO Demonstration II 16:00 - 18:00 (2h) Demonstration II Cleanroom MIMENTO	Micro-nanotechnology school Day 2 Coffee 8:00 - 8:30 (30min) Micro-nanotechnology school Day 2 Coffee Polishing and surface quality 8:30 - 9:20 (50min) Polishing and surface quality Amphi JJ Gagnepain, FEMTO-ST V. Menard, CImap ENSICaen Wafer bonding (activation of surface, molecular bonding, anodic bonding and thermocompression) 9:20 - 10:10 (50min) Wafer bonding (activation of surface, molecular bonding, anodic bonding and thermocompression) Amphi JJ Gagnepain, FEMTO-ST Samuel Charlot, LAAS Coffee break 10:10 - 10:30 (20min) Coffee break Growth of thin films (adhesion, crystallisation, control of orientation and grain size, stresses) 10:30 - 11:20 (50min) Growth of thin films (adhesion, crystallisation, control of orientation and grain size, stresses) Amphi JJ Gagnepain, FEMTO-ST Ausrine Bartasyte, FEMTO-ST Characterization of DC electrical (transport, resistivity, instrumentation, ohmic contacts) and optical properties 11:20 - 12:10 (50min) Characterization of DC electrical (transport, resistivity, instrumentation, ohmic contacts) and optical properties Amphi JJ Gagnepain, FEMTO-ST Samuel Margueron, FEMTO-ST Lunch 12:10 - 13:30 (1h20) Lunch (Optional) Ellipsometry (advanced level) 13:30 - 14:00 (30min) (Optional) Ellipsometry (advanced level) Amphi JJ Gagnepain, FEMTO-ST Samuel Margueron, FEMTO-ST Demonstration III 14:00 - 16:00 (2h) Demonstration III Cleanroom MIMENTO Demonstration IV 16:00 - 18:00 (2h) Demonstration IV Cleanroom MIMENTO	JNTE Day 1 Welcome - Registration 8:00 - 8:45 (45min) JNTE Day 1 Welcome - Registration Hall, ENSMM Welcoming address 8:45 - 9:00 (15min) Welcoming address Amphi E Chatelet, ENSMM P. Vairac (SUPMICROTECH) / J.-L. Leclercq (INL) / A. Bartasyte (FEMTO-ST) Les programmes nationaux autour des nanotechnologies au CNRS 9:00 - 9:30 (30min) Les programmes nationaux autour des nanotechnologies au CNRS Amphi E Chatelet, ENSMM Isabelle Sagnes - INSIS CNRS Keynote Talk: 3D laser micro and nanoprinting 9:30 - 10:15 (45min) Keynote Talk: 3D laser micro and nanoprinting Amphi E Chatelet, ENSMM M. Wegener - KIT https://2022jnte.sciencesconf.org/data/program/_1070_JNTE22_Wegener_abstract.pdf Coffee break 10:15 - 10:35 (20min) Coffee break Hall, ENSMM Plasmonic microcapsules for strain detection (visio) 10:35 - 11:05 (30min) Plasmonic microcapsules for strain detection (visio) Amphi E Chatelet, ENSMM Remi Dreyfus - LN2 https://2022jnte.sciencesconf.org/data/program/abstract_Dreyfus.pdf Self-assembly of DNA origamis for nanolithographic applications 11:05 - 11:35 (30min) Self-assembly of DNA origamis for nanolithographic applications Amphi E Chatelet, ENSMM Nicolas Triomphe - CBS https://2022jnte.sciencesconf.org/data/program/JNTE22_Abstract_Triomphe.pdf Flash poster presentation 11:35 - 12:30 (55min) Flash poster presentation Amphi E Chatelet, ENSMM https://2022jnte.sciencesconf.org/data/program/PosterListe_3.pdf Lunch 12:30 - 14:00 (1h30) Lunch Hall, ENSMM Fabrication of titanium MEMS 14:00 - 14:30 (30min) Fabrication of titanium MEMS Amphi E Chatelet, ENSMM Gwenaël Bécan - MISTIC Technologies https://2022jnte.sciencesconf.org/data/program/Abstract_JNTE22_Becan.pdf How can nature help us find mechanical solutions ? (visio) 14:30 - 15:00 (30min) How can nature help us find mechanical solutions ? (visio) Amphi E Chatelet, ENSMM Jean-Marc Linares - ISM https://2022jnte.sciencesconf.org/data/program/JNTE22_Linares.pdf Biomimetic organs-on-chip 15:00 - 15:30 (30min) Biomimetic organs-on-chip Amphi E Chatelet, ENSMM Caterina Tomba - INL https://2022jnte.sciencesconf.org/data/program/JNTE22_Abstract_TombaCaterina.pdf Coffee break 15:30 - 16:00 (30min) Coffee break Hall, ENSMM Microfluidic technologies for diagnostic applications 16:00 - 16:30 (30min) Microfluidic technologies for diagnostic applications Amphi E Chatelet, ENSMM Karla Perez Toralla - CEA Saclay https://2022jnte.sciencesconf.org/data/program/JNTE22_Template_2_Karla_Perez_Toralla.pdf Exhibitor session 16:30 - 17:30 (1h) Exhibitor session Amphi E Chatelet, ENSMM Poster Session / Tasting of local products (Cheese/Wine) 17:30 - 19:00 (1h30) Poster Session / Tasting of local products (Cheese/Wine) Hall, ENSMM https://2022jnte.sciencesconf.org/data/program/PosterListe_4.pdf	JNTE Day 2 Welcome 8:00 - 8:30 (30min) JNTE Day 2 Welcome Hall, ENSMM Facilities Networks, EuroNanoLab and Renatech-projets 8:30 - 9:00 (30min) Facilities Networks, EuroNanoLab and Renatech-projets Amphi E Chatelet, ENSMM M. de Labachelerie, B. Lecha Filière Niobate de lithium en couches minces en France 9:00 - 9:30 (30min) Filière Niobate de lithium en couches minces en France Amphi E Chatelet, ENSMM Florent Doutre - INPHYNI https://2022jnte.sciencesconf.org/data/program/abstract_doutre.pdf Johnny Moughames - FEMTO-ST 9:30 - 9:45 (15min) Johnny Moughames - FEMTO-ST Amphi E Chatelet, ENSMM 3D Graytone Printing for Thermo-Mechanical and Optical Applications https://2022jnte.sciencesconf.org/data/program/JNTE22_MOUGHAMES.pdf Thierry Grosjean - FEMTO-ST 9:45 - 10:00 (15min) Thierry Grosjean - FEMTO-ST Amphi E Chatelet, ENSMM Fabrication of sub-micron 3D helical antennas by FIB induced deposition and GLAD for subwavelength polarization optics https://2022jnte.sciencesconf.org/data/program/Abstract_JNTE22_SALUT.pdf Coffee break 10:00 - 10:30 (30min) Coffee break Hall, ENSMM Growth of crystalline III-V thin films using low-temperature plasma 10:30 - 11:00 (30min) Growth of crystalline III-V thin films using low-temperature plasma Amphi E Chatelet, ENSMM Karim Ouaras - LPCIM https://2022jnte.sciencesconf.org/data/program/JNTE22_ABSTRACT_Karim_Ouaras.pdf Dépôts de couches céramiques par projection thermique: procédés et applications 11:00 - 11:30 (30min) Dépôts de couches céramiques par projection thermique: procédés et applications Amphi E Chatelet, ENSMM Vincent Rat - IRCER https://2022jnte.sciencesconf.org/data/program/JNTE22_Template_V_Rat.pdf Victor Vallejo-Otero - Laboratoire Hubert Curien 11:30 - 11:45 (15min) Victor Vallejo-Otero - Laboratoire Hubert Curien Amphi E Chatelet, ENSMM Nouveau procédé de micro-nanostructuration de couches de nitrure de titane (TiN) par la combinaison d'un sol-gel d'oxide de titane (TiO2) et d'un recuit rapide thermique (RTA) https://2022jnte.sciencesconf.org/data/program/JNTE22_VALLEJO.pdf Hamza Kellou (visio) - LPCM/LPCMC 11:45 - 12:00 (15min) Hamza Kellou (visio) - LPCM/LPCMC Amphi E Chatelet, ENSMM Bismuth three oxyde Nanopowder to inhibit and photostabilize 2-Aminophenol https://2022jnte.sciencesconf.org/data/program/Abstract_kellou.pdf Matériaux 1D-2D par la méthode de dépôt LEGO (visio) 12:00 - 12:30 (30min) Matériaux 1D-2D par la méthode de dépôt LEGO (visio) Amphi E Chatelet, ENSMM Paolo Bondavali - TRT https://2022jnte.sciencesconf.org/data/program/Paolo_Bondavalli_Abstract.pdf Lunch 12:30 - 14:00 (1h30) Lunch Hall, ENSMM The femtosecond laser at the service of society 14:00 - 14:30 (30min) The femtosecond laser at the service of society Amphi E Chatelet, ENSMM Julien Granier - EIG Manutech USD https://2022jnte.sciencesconf.org/data/program/JNTE22_Manutech_Granier.pdf NEW French Nano-Imprint Lithography NETWORK and ressources 14:30 - 15:00 (30min) NEW French Nano-Imprint Lithography NETWORK and ressources Amphi E Chatelet, ENSMM Céline Chevalier - INL - Renatech+ https://2022jnte.sciencesconf.org/data/program/JNTE22_Reseau_NIL.pdf Olha Sysova - IS2M 15:00 - 15:15 (15min) Olha Sysova - IS2M Amphi E Chatelet, ENSMM Water-soluble resist for deep-UV (193nm) photolithography based on a chitosan bio-polymer https://2022jnte.sciencesconf.org/data/program/abstract_Soppera.pdf Amani Ouirimi - LPL 15:15 - 15:30 (15min) Amani Ouirimi - LPL Amphi E Chatelet, ENSMM Mixed-order distributed feed-back organic diode laser cavities: from the design to the characterization https://2022jnte.sciencesconf.org/data/program/Abstract_OUIRIMI.pdf Coffee break 15:30 - 16:00 (30min) Coffee break Hall, ENSMM In-situ device fabrication in Molecular Beam Epitaxy Cluster 16:00 - 16:30 (30min) In-situ device fabrication in Molecular Beam Epitaxy Cluster Amphi E Chatelet, ENSMM Xin Guan - TUE https://2022jnte.sciencesconf.org/data/program/Xin_GUAN_JNTE22.pdf Sylwester Bargiel - FEMTO-ST 16:30 - 16:45 (15min) Sylwester Bargiel - FEMTO-ST Amphi E Chatelet, ENSMM Femtosecond laser irradiation followed by chemical etching - Versatile method for fabrication of innovative 3D structures in glass materials https://2022jnte.sciencesconf.org/data/program/JNTE22_Bargiel_et_al_Abstract.pdf Feriel Laourine - GREMI 16:45 - 17:00 (15min) Feriel Laourine - GREMI Amphi E Chatelet, ENSMM Stainless steel patterning at micrometric scale with ICP chlorinated plasma: Process optimization and understanding of etching mechanisms https://2022jnte.sciencesconf.org/data/program/Abstract_LAOURINE.pdf Jean-Yves Rauch - FEMTO-ST 17:00 - 17:15 (15min) Jean-Yves Rauch - FEMTO-ST Hall, ENSMM Polyarticulated, light-activated structures made from origami of silica membranes, installed at the end of optical fibres https://2022jnte.sciencesconf.org/data/program/JNTE22_Rauch_2022.pdf Sébastien Thibaud - SUPMICROTECH-ENSMM 17:15 - 17:30 (15min) Sébastien Thibaud - SUPMICROTECH-ENSMM Amphi E Chatelet, ENSMM De la micromécanique horlogère aux composants miniaturisés flexibles https://2022jnte.sciencesconf.org/data/program/JNTE22_Thibaud.pdf Gala Dinner 17:30 - 18:30 (1h) Gala Dinner	JNTE Day 3 Welcome 8:00 - 8:30 (30min) JNTE Day 3 Welcome Hall, ENSMM The potential of 3D Plastronics: from packaging to ecofriendly innovative systems 8:30 - 9:00 (30min) The potential of 3D Plastronics: from packaging to ecofriendly innovative systems Amphi E Chatelet, ENSMM Philippe Lombard - Ampere https://2022jnte.sciencesconf.org/data/program/JNTE22_Plastronique_2022_Lombard.pdf Heterogeneous integration on silicon nitride for integrated photonics: lasers and nonlinear materials 9:00 - 9:30 (30min) Heterogeneous integration on silicon nitride for integrated photonics: lasers and nonlinear materials Amphi E Chatelet, ENSMM Maximilien Billet - Ghent University https://2022jnte.sciencesconf.org/data/program/JNTE22_Billet.pdf (canceled) Frédéric Zamkotsian - LAM 9:30 - 9:45 (15min) (canceled) Frédéric Zamkotsian - LAM Amphi E Chatelet, ENSMM MOEMS for space applications: Micromirror arrays for Universe and Earth Observation https://2022jnte.sciencesconf.org/data/program/JNTE22_MOEMSforSpace_FZ1.pdf Jules Duraz - C2N 9:45 - 10:00 (15min) Jules Duraz - C2N Amphi E Chatelet, ENSMM Fabrication and characterization techniques to study flexible micro light-emitting diodes with a millimetric radius of curvature https://2022jnte.sciencesconf.org/data/program/abstract_duraz.pdf Coffee break 10:00 - 10:30 (30min) Coffee break Hall, ENSMM Flexiboard: CMOS-MEMS chiplet integration with soft materials towards autonomous programmable matter 10:30 - 11:00 (30min) Flexiboard: CMOS-MEMS chiplet integration with soft materials towards autonomous programmable matter Amphi E Chatelet, ENSMM Yoshio Mita - UTokyo, LIMMS https://2022jnte.sciencesconf.org/data/program/YMita_JNTE22.pdf (canceled) Nanofabrication of topological insulators 11:00 - 11:30 (30min) (canceled) Nanofabrication of topological insulators Amphi E Chatelet, ENSMM Sébastien Plissard - LAAS Anne-Claire Eiler - UTokyo 11:30 - 11:45 (15min) Anne-Claire Eiler - UTokyo Amphi E Chatelet, ENSMM Design and fabrication of an SOI-CMOS large-scale integrated circuit for bioelectrochemical sensing https://2022jnte.sciencesconf.org/data/program/abstract_eiler.pdf Alain Bosseboeuf - C2N 11:45 - 12:00 (15min) Alain Bosseboeuf - C2N Amphi E Chatelet, ENSMM Activation and gas sorption of Y-based getter films for wafer-level vacuum packaging of microsensors https://2022jnte.sciencesconf.org/data/program/JNTE22_Bosseboeuf.pdf 2D materials by chemical vapor deposition: from coupons to large area depositions 12:00 - 12:30 (30min) 2D materials by chemical vapor deposition: from coupons to large area depositions Amphi E Chatelet, ENSMM Vincent Astié - Annealsys https://2022jnte.sciencesconf.org/data/program/abstract_astie.pdf Conclusions 12:30 - 12:45 (15min) Conclusions Amphi E Chatelet, ENSMM Lunch 12:45 - 14:00 (1h15) Lunch Hall, ENSMM

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