Journées Nationales sur les Technologies Emergentes en Micro-Nanofabrication
Ecole de Micro-Nanotechnologie
28/11 - 2/12, Besançon
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JNTE 2022
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Hôtels
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Programme
Semaine
Lun. 28
Mar. 29
Mer. 30
Jeu. 01
Ven. 02
Liste
Lun. 28
Mar. 29
Mer. 30
Jeu. 01
Ven. 02
08:00
09:00
10:00
11:00
12:00
13:00
14:00
15:00
16:00
17:00
18:00
19:00
Ecole Micro-Nanotechnologie Jour 1
Café bienvenue
8:00 - 8:30 (30min)
Ecole Micro-Nanotechnologie Jour 1
Café bienvenue
Lithographie I (lithographie UV, écriture directe, masques)
8:30 - 9:20 (50min)
Lithographie I (lithographie UV, écriture directe, masques)
Amphi JJ Gagnepain, FEMTO-ST
Guillaume Jutzi, FEMTO-ST
Lithographie II (lithographie à deux photons): MPO 100, a multi-user tool for 3D lithography and 3D microprinting
9:20 - 10:10 (50min)
Lithographie II (lithographie à deux photons): MPO 100, a multi-user tool for 3D lithography and 3D microprinting
Amphi JJ Gagnepain, FEMTO-ST
S. Kohlhaas, Heidelberg Instruments / Multiphoton Optics
Pause café
10:10 - 10:30 (20min)
Pause café
Gravure humide et RIE
10:30 - 11:20 (50min)
Gravure humide et RIE
Amphi JJ Gagnepain, FEMTO-ST
Djaffar Belharet, FEMTO-ST
Micro-structuration de verre (gravure humide et sèche, procédé laser femto seconde direct et assisté par gravure humide, micromoulage)
11:20 - 12:10 (50min)
Micro-structuration de verre (gravure humide et sèche, procédé laser femto seconde direct et assisté par gravure humide, micromoulage)
Amphi JJ Gagnepain, FEMTO-ST
Sylwester Bargiel, FEMTO-ST
Déjeuner
12:10 - 13:30 (1h20)
Déjeuner
Introduction salle blanche
13:30 - 14:00 (30min)
Introduction salle blanche
Amphi JJ Gagnepain, FEMTO-ST
Samuel Queste, FEMTO-ST
Atelier I
14:00 - 16:00 (2h)
Atelier I
Cleanroom MIMENTO
Atelier II
16:00 - 18:00 (2h)
Atelier II
Cleanroom MIMENTO
Ecole de Micro-nanotechnologie Jour 2
Café
8:00 - 8:30 (30min)
Ecole de Micro-nanotechnologie Jour 2
Café
Polissage et qualité de surface
8:30 - 9:20 (50min)
Polissage et qualité de surface
Amphi JJ Gagnepain, FEMTO-ST
V. Menard, CImap ENSICaen
Wafer bonding (activation de surface, collage moléculaire, anodique, thermo-compression)
9:20 - 10:10 (50min)
Wafer bonding (activation de surface, collage moléculaire, anodique, thermo-compression)
Amphi JJ Gagnepain, FEMTO-ST
Samuel Charlot, LAAS
Pause café
10:10 - 10:30 (20min)
Pause café
Croissance des couches minces (adhésion, cristallisation, contrôle d'orientation et taille des grains, contraintes)
10:30 - 11:20 (50min)
Croissance des couches minces (adhésion, cristallisation, contrôle d'orientation et taille des grains, contraintes)
Amphi JJ Gagnepain, FEMTO-ST
Ausrine Bartasyte, FEMTO-ST
Caractérisation des propriétés électriques DC (transport, résistivité, instrumentation, contact ohmique) et optiques
11:20 - 12:10 (50min)
Caractérisation des propriétés électriques DC (transport, résistivité, instrumentation, contact ohmique) et optiques
Amphi JJ Gagnepain, FEMTO-ST
Samuel Margueron, FEMTO-ST
Déjeuner
12:10 - 13:30 (1h20)
Déjeuner
(En option) Ellipsométrie (niveau avancé)
13:30 - 14:00 (30min)
(En option) Ellipsométrie (niveau avancé)
Amphi JJ Gagnepain, FEMTO-ST
Samuel Margueron, FEMTO-ST
Atelier III
14:00 - 16:00 (2h)
Atelier III
Cleanroom MIMENTO
Atelier IV
16:00 - 18:00 (2h)
Atelier IV
Cleanroom MIMENTO
JNTE Jour 1
Accueil - Enregistrement
8:00 - 8:45 (45min)
JNTE Jour 1
Accueil - Enregistrement
Hall, ENSMM
Ouverture
8:45 - 9:00 (15min)
Ouverture
Amphi E Chatelet, ENSMM
P. Vairac (SUPMICROTECH) / J.-L. Leclercq (INL) / A. Bartasyte (FEMTO-ST)
Les programmes nationaux autour des nanotechnologies au CNRS
9:00 - 9:30 (30min)
Les programmes nationaux autour des nanotechnologies au CNRS
Amphi E Chatelet, ENSMM
Isabelle Sagnes - INSIS CNRS
Keynote Talk: 3D laser micro and nanoprinting
9:30 - 10:15 (45min)
Keynote Talk: 3D laser micro and nanoprinting
Amphi E Chatelet, ENSMM
M. Wegener - KIT
https://2022jnte.sciencesconf.org/data/program/_1070_JNTE22_Wegener_abstract.pdf
Pause café
10:15 - 10:35 (20min)
Pause café
Hall, ENSMM
Plasmonic microcapsules for strain detection (visio)
10:35 - 11:05 (30min)
Plasmonic microcapsules for strain detection (visio)
Amphi E Chatelet, ENSMM
Remi Dreyfus - LN2
https://2022jnte.sciencesconf.org/data/program/abstract_Dreyfus.pdf
Self-assembly of DNA origamis for nanolithographic applications
11:05 - 11:35 (30min)
Self-assembly of DNA origamis for nanolithographic applications
Amphi E Chatelet, ENSMM
Nicolas Triomphe - CBS
https://2022jnte.sciencesconf.org/data/program/JNTE22_Abstract_Triomphe.pdf
Session Flash Poster
11:35 - 12:30 (55min)
Session Flash Poster
Amphi E Chatelet, ENSMM
https://2022jnte.sciencesconf.org/data/program/PosterListe_3.pdf
Déjeuner
12:30 - 14:00 (1h30)
Déjeuner
Hall, ENSMM
Fabrication of titanium MEMS
14:00 - 14:30 (30min)
Fabrication of titanium MEMS
Amphi E Chatelet, ENSMM
Gwenaël Bécan - MISTIC Technologies
https://2022jnte.sciencesconf.org/data/program/Abstract_JNTE22_Becan.pdf
How can nature help us find mechanical solutions ? (visio)
14:30 - 15:00 (30min)
How can nature help us find mechanical solutions ? (visio)
Amphi E Chatelet, ENSMM
Jean-Marc Linares - ISM
https://2022jnte.sciencesconf.org/data/program/JNTE22_Linares.pdf
Biomimetic organs-on-chip
15:00 - 15:30 (30min)
Biomimetic organs-on-chip
Amphi E Chatelet, ENSMM
Caterina Tomba - INL
https://2022jnte.sciencesconf.org/data/program/JNTE22_Abstract_TombaCaterina.pdf
Pause café
15:30 - 16:00 (30min)
Pause café
Hall, ENSMM
Microfluidic technologies for diagnostic applications
16:00 - 16:30 (30min)
Microfluidic technologies for diagnostic applications
Amphi E Chatelet, ENSMM
Karla Perez Toralla - CEA Saclay
https://2022jnte.sciencesconf.org/data/program/JNTE22_Template_2_Karla_Perez_Toralla.pdf
Session exposant
16:30 - 17:30 (1h)
Session exposant
Amphi E Chatelet, ENSMM
Session Poster / Dégustation de produits locaux (Fromage/vin)
17:30 - 19:00 (1h30)
Session Poster / Dégustation de produits locaux (Fromage/vin)
Hall, ENSMM
https://2022jnte.sciencesconf.org/data/program/PosterListe_4.pdf
JNTE Jour 2
Accueil
8:00 - 8:30 (30min)
JNTE Jour 2
Accueil
Hall, ENSMM
Réseaux Plateformes, EuroNanoLab et Renatech-projets
8:30 - 9:00 (30min)
Réseaux Plateformes, EuroNanoLab et Renatech-projets
Amphi E Chatelet, ENSMM
M. de Labachelerie, B. Lecha
Filière Niobate de lithium en couches minces en France
9:00 - 9:30 (30min)
Filière Niobate de lithium en couches minces en France
Amphi E Chatelet, ENSMM
Florent Doutre - INPHYNI
https://2022jnte.sciencesconf.org/data/program/abstract_doutre.pdf
Johnny Moughames - FEMTO-ST
9:30 - 9:45 (15min)
Johnny Moughames - FEMTO-ST
Amphi E Chatelet, ENSMM
3D Graytone Printing for Thermo-Mechanical and Optical Applications
https://2022jnte.sciencesconf.org/data/program/JNTE22_MOUGHAMES.pdf
Thierry Grosjean - FEMTO-ST
9:45 - 10:00 (15min)
Thierry Grosjean - FEMTO-ST
Amphi E Chatelet, ENSMM
Fabrication of sub-micron 3D helical antennas by FIB induced deposition and GLAD for subwavelength polarization optics
https://2022jnte.sciencesconf.org/data/program/Abstract_JNTE22_SALUT.pdf
Pause café
10:00 - 10:30 (30min)
Pause café
Hall, ENSMM
Growth of crystalline III-V thin films using low-temperature plasma
10:30 - 11:00 (30min)
Growth of crystalline III-V thin films using low-temperature plasma
Amphi E Chatelet, ENSMM
Karim Ouaras - LPCIM
https://2022jnte.sciencesconf.org/data/program/JNTE22_ABSTRACT_Karim_Ouaras.pdf
Dépôts de couches céramiques par projection thermique: procédés et applications
11:00 - 11:30 (30min)
Dépôts de couches céramiques par projection thermique: procédés et applications
Amphi E Chatelet, ENSMM
Vincent Rat - IRCER
https://2022jnte.sciencesconf.org/data/program/JNTE22_Template_V_Rat.pdf
Victor Vallejo-Otero - Laboratoire Hubert Curien
11:30 - 11:45 (15min)
Victor Vallejo-Otero - Laboratoire Hubert Curien
Amphi E Chatelet, ENSMM
Nouveau procédé de micro-nanostructuration de couches de nitrure de titane (TiN) par la combinaison d'un sol-gel d'oxide de titane (TiO2) et d'un recuit rapide thermique (RTA)
https://2022jnte.sciencesconf.org/data/program/JNTE22_VALLEJO.pdf
Hamza Kellou (visio) - LPCM/LPCMC
11:45 - 12:00 (15min)
Hamza Kellou (visio) - LPCM/LPCMC
Amphi E Chatelet, ENSMM
Bismuth three oxyde Nanopowder to inhibit and photostabilize 2-Aminophenol
https://2022jnte.sciencesconf.org/data/program/Abstract_kellou.pdf
Matériaux 1D-2D par la méthode de dépôt LEGO (visio)
12:00 - 12:30 (30min)
Matériaux 1D-2D par la méthode de dépôt LEGO (visio)
Amphi E Chatelet, ENSMM
Paolo Bondavali - TRT
https://2022jnte.sciencesconf.org/data/program/Paolo_Bondavalli_Abstract.pdf
Déjeuner
12:30 - 14:00 (1h30)
Déjeuner
Hall, ENSMM
The femtosecond laser at the service of society
14:00 - 14:30 (30min)
The femtosecond laser at the service of society
Amphi E Chatelet, ENSMM
Julien Granier - EIG Manutech USD
https://2022jnte.sciencesconf.org/data/program/JNTE22_Manutech_Granier.pdf
NEW French Nano-Imprint Lithography NETWORK and ressources
14:30 - 15:00 (30min)
NEW French Nano-Imprint Lithography NETWORK and ressources
Amphi E Chatelet, ENSMM
Céline Chevalier - INL - Renatech+
https://2022jnte.sciencesconf.org/data/program/JNTE22_Reseau_NIL.pdf
Olha Sysova - IS2M
15:00 - 15:15 (15min)
Olha Sysova - IS2M
Amphi E Chatelet, ENSMM
Water-soluble resist for deep-UV (193nm) photolithography based on a chitosan bio-polymer
https://2022jnte.sciencesconf.org/data/program/abstract_Soppera.pdf
Amani Ouirimi - LPL
15:15 - 15:30 (15min)
Amani Ouirimi - LPL
Amphi E Chatelet, ENSMM
Mixed-order distributed feed-back organic diode laser cavities: from the design to the characterization
https://2022jnte.sciencesconf.org/data/program/Abstract_OUIRIMI.pdf
Pause café
15:30 - 16:00 (30min)
Pause café
Hall, ENSMM
In-situ device fabrication in Molecular Beam Epitaxy Cluster
16:00 - 16:30 (30min)
In-situ device fabrication in Molecular Beam Epitaxy Cluster
Amphi E Chatelet, ENSMM
Xin Guan - TUE
https://2022jnte.sciencesconf.org/data/program/Xin_GUAN_JNTE22.pdf
Sylwester Bargiel - FEMTO-ST
16:30 - 16:45 (15min)
Sylwester Bargiel - FEMTO-ST
Amphi E Chatelet, ENSMM
Femtosecond laser irradiation followed by chemical etching - Versatile method for fabrication of innovative 3D structures in glass materials
https://2022jnte.sciencesconf.org/data/program/JNTE22_Bargiel_et_al_Abstract.pdf
Feriel Laourine - GREMI
16:45 - 17:00 (15min)
Feriel Laourine - GREMI
Amphi E Chatelet, ENSMM
Stainless steel patterning at micrometric scale with ICP chlorinated plasma: Process optimization and understanding of etching mechanisms
https://2022jnte.sciencesconf.org/data/program/Abstract_LAOURINE.pdf
Jean-Yves Rauch - FEMTO-ST
17:00 - 17:15 (15min)
Jean-Yves Rauch - FEMTO-ST
Hall, ENSMM
Polyarticulated, light-activated structures made from origami of silica membranes, installed at the end of optical fibres
https://2022jnte.sciencesconf.org/data/program/JNTE22_Rauch_2022.pdf
Sébastien Thibaud - SUPMICROTECH-ENSMM
17:15 - 17:30 (15min)
Sébastien Thibaud - SUPMICROTECH-ENSMM
Amphi E Chatelet, ENSMM
De la micromécanique horlogère aux composants miniaturisés flexibles
https://2022jnte.sciencesconf.org/data/program/JNTE22_Thibaud.pdf
Départ Musée du Temps / Repas de Gala (Centre Diocésain Pierre de Grammont)
17:30 - 18:30 (1h)
Départ Musée du Temps / Repas de Gala (Centre Diocésain Pierre de Grammont)
JNTE Jour 3
Accueil
8:00 - 8:30 (30min)
JNTE Jour 3
Accueil
Hall, ENSMM
The potential of 3D Plastronics: from packaging to ecofriendly innovative systems
8:30 - 9:00 (30min)
The potential of 3D Plastronics: from packaging to ecofriendly innovative systems
Amphi E Chatelet, ENSMM
Philippe Lombard - Ampere
https://2022jnte.sciencesconf.org/data/program/JNTE22_Plastronique_2022_Lombard.pdf
Heterogeneous integration on silicon nitride for integrated photonics: lasers and nonlinear materials
9:00 - 9:30 (30min)
Heterogeneous integration on silicon nitride for integrated photonics: lasers and nonlinear materials
Amphi E Chatelet, ENSMM
Maximilien Billet - Ghent University
https://2022jnte.sciencesconf.org/data/program/JNTE22_Billet.pdf
(supprimé) Frédéric Zamkotsian - LAM
9:30 - 9:45 (15min)
(supprimé) Frédéric Zamkotsian - LAM
Amphi E Chatelet, ENSMM
MOEMS for space applications: Micromirror arrays for Universe and Earth Observation
https://2022jnte.sciencesconf.org/data/program/JNTE22_MOEMSforSpace_FZ1.pdf
Jules Duraz - C2N
9:45 - 10:00 (15min)
Jules Duraz - C2N
Amphi E Chatelet, ENSMM
Fabrication and characterization techniques to study flexible micro light-emitting diodes with a millimetric radius of curvature
https://2022jnte.sciencesconf.org/data/program/abstract_duraz.pdf
Pause café
10:00 - 10:30 (30min)
Pause café
Hall, ENSMM
Flexiboard: CMOS-MEMS chiplet integration with soft materials towards autonomous programmable matter
10:30 - 11:00 (30min)
Flexiboard: CMOS-MEMS chiplet integration with soft materials towards autonomous programmable matter
Amphi E Chatelet, ENSMM
Yoshio Mita - UTokyo, LIMMS
https://2022jnte.sciencesconf.org/data/program/YMita_JNTE22.pdf
(supprimé) Nanofabrication of topological insulators
11:00 - 11:30 (30min)
(supprimé) Nanofabrication of topological insulators
Amphi E Chatelet, ENSMM
Sébastien Plissard - LAAS
Anne-Claire Eiler - UTokyo
11:30 - 11:45 (15min)
Anne-Claire Eiler - UTokyo
Amphi E Chatelet, ENSMM
Design and fabrication of an SOI-CMOS large-scale integrated circuit for bioelectrochemical sensing
https://2022jnte.sciencesconf.org/data/program/abstract_eiler.pdf
Alain Bosseboeuf - C2N
11:45 - 12:00 (15min)
Alain Bosseboeuf - C2N
Amphi E Chatelet, ENSMM
Activation and gas sorption of Y-based getter films for wafer-level vacuum packaging of microsensors
https://2022jnte.sciencesconf.org/data/program/JNTE22_Bosseboeuf.pdf
2D materials by chemical vapor deposition: from coupons to large area depositions
12:00 - 12:30 (30min)
2D materials by chemical vapor deposition: from coupons to large area depositions
Amphi E Chatelet, ENSMM
Vincent Astié - Annealsys
https://2022jnte.sciencesconf.org/data/program/abstract_astie.pdf
Conclusions
12:30 - 12:45 (15min)
Conclusions
Amphi E Chatelet, ENSMM
Déjeuner
12:45 - 14:00 (1h15)
Déjeuner
Hall, ENSMM
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