French symposium on Emerging Technologies for Micro-Nanofabrication
Micro-Nanotechnology School
28/11 - 2/12, Besançon, France
Micro-Nanotechnology School
28/11 - 2/12, Besançon, France
Planning
Monday, November 28, 2022
| Time | Event | (+) |
| 08:00 - 08:30 |
Micro-nanotechnology school Day 1 Welcome coffee |
|
| 08:30 - 09:20 | Lithography I (UV lithography, direct writing, masks) (Amphi JJ Gagnepain, FEMTO-ST) - Guillaume Jutzi, FEMTO-ST | |
| 09:20 - 10:10 | Lithography II (two photon lithography): MPO 100, a multi-user tool for 3D lithography and 3D microprinting (Amphi JJ Gagnepain, FEMTO-ST) - S. Kohlhaas, Heidelberg Instruments / Multiphoton Optics | |
| 10:10 - 10:30 | Coffee break | |
| 10:30 - 11:20 | Wet etching and RIE (Amphi JJ Gagnepain, FEMTO-ST) - Djaffar Belharet, FEMTO-ST | |
| 11:20 - 12:10 | Microstructuring of glass (wet and dry etching, direct and assited femtosecond laser processing, micromolding) (Amphi JJ Gagnepain, FEMTO-ST) - Sylwester Bargiel, FEMTO-ST | |
| 12:10 - 13:30 | Lunch | |
| 13:30 - 14:00 | Introduction to the clean room environment (Amphi JJ Gagnepain, FEMTO-ST) - Samuel Queste, FEMTO-ST | |
| 14:00 - 16:00 | Demonstration I (Cleanroom MIMENTO) | |
| 16:00 - 18:00 | Demonstration II (Cleanroom MIMENTO) |
Tuesday, November 29, 2022
| Time | Event | (+) |
| 08:00 - 08:30 |
Micro-nanotechnology school Day 2 Coffee |
|
| 08:30 - 09:20 | Polishing and surface quality (Amphi JJ Gagnepain, FEMTO-ST) - V. Menard, CImap ENSICaen | |
| 09:20 - 10:10 | Wafer bonding (activation of surface, molecular bonding, anodic bonding and thermocompression) (Amphi JJ Gagnepain, FEMTO-ST) - Samuel Charlot, LAAS | |
| 10:10 - 10:30 | Coffee break | |
| 10:30 - 11:20 | Growth of thin films (adhesion, crystallisation, control of orientation and grain size, stresses) (Amphi JJ Gagnepain, FEMTO-ST) - Ausrine Bartasyte, FEMTO-ST | |
| 11:20 - 12:10 | Characterization of DC electrical (transport, resistivity, instrumentation, ohmic contacts) and optical properties (Amphi JJ Gagnepain, FEMTO-ST) - Samuel Margueron, FEMTO-ST | |
| 12:10 - 13:30 | Lunch | |
| 13:30 - 14:00 | (Optional) Ellipsometry (advanced level) (Amphi JJ Gagnepain, FEMTO-ST) - Samuel Margueron, FEMTO-ST | |
| 14:00 - 16:00 | Demonstration III (Cleanroom MIMENTO) | |
| 16:00 - 18:00 | Demonstration IV (Cleanroom MIMENTO) |
Wednesday, November 30, 2022
| Time | Event | (+) |
| 08:00 - 08:45 |
JNTE Day 1 Welcome - Registration (Hall, ENSMM) |
|
| 08:45 - 09:00 | Welcoming address (Amphi E Chatelet, ENSMM) - P. Vairac (SUPMICROTECH) / J.-L. Leclercq (INL) / A. Bartasyte (FEMTO-ST) | |
| 09:00 - 09:30 | Les programmes nationaux autour des nanotechnologies au CNRS (Amphi E Chatelet, ENSMM) - Isabelle Sagnes - INSIS CNRS | |
| 09:30 - 10:15 | Keynote Talk: 3D laser micro and nanoprinting (Amphi E Chatelet, ENSMM) - M. Wegener - KIT |
|
| 10:15 - 10:35 | Coffee break (Hall, ENSMM) | |
| 10:35 - 11:05 | Plasmonic microcapsules for strain detection (visio) (Amphi E Chatelet, ENSMM) - Remi Dreyfus - LN2 |
|
| 11:05 - 11:35 | Self-assembly of DNA origamis for nanolithographic applications (Amphi E Chatelet, ENSMM) - Nicolas Triomphe - CBS |
|
| 11:35 - 12:30 | Flash poster presentation (Amphi E Chatelet, ENSMM) |
|
| 12:30 - 14:00 | Lunch (Hall, ENSMM) | |
| 14:00 - 14:30 | Fabrication of titanium MEMS (Amphi E Chatelet, ENSMM) - Gwenaël Bécan - MISTIC Technologies |
|
| 14:30 - 15:00 | How can nature help us find mechanical solutions ? (visio) (Amphi E Chatelet, ENSMM) - Jean-Marc Linares - ISM |
|
| 15:00 - 15:30 | Biomimetic organs-on-chip (Amphi E Chatelet, ENSMM) - Caterina Tomba - INL |
|
| 15:30 - 16:00 | Coffee break (Hall, ENSMM) | |
| 16:00 - 16:30 | Microfluidic technologies for diagnostic applications (Amphi E Chatelet, ENSMM) - Karla Perez Toralla - CEA Saclay |
|
| 16:30 - 17:30 | Exhibitor session (Amphi E Chatelet, ENSMM) | |
| 17:30 - 19:00 | Poster Session / Tasting of local products (Cheese/Wine) (Hall, ENSMM) |
|
Thursday, December 1, 2022
| Time | Event | (+) |
| 08:00 - 08:30 |
JNTE Day 2 Welcome (Hall, ENSMM) |
|
| 08:30 - 09:00 | Facilities Networks, EuroNanoLab and Renatech-projets (Amphi E Chatelet, ENSMM) - M. de Labachelerie, B. Lecha | |
| 09:00 - 09:30 | Filière Niobate de lithium en couches minces en France (Amphi E Chatelet, ENSMM) - Florent Doutre - INPHYNI |
|
| 09:30 - 09:45 | Johnny Moughames - FEMTO-ST (Amphi E Chatelet, ENSMM) - 3D Graytone Printing for Thermo-Mechanical and Optical Applications |
|
| 09:45 - 10:00 | Thierry Grosjean - FEMTO-ST (Amphi E Chatelet, ENSMM) - Fabrication of sub-micron 3D helical antennas by FIB induced deposition and GLAD for subwavelength polarization optics |
|
| 10:00 - 10:30 | Coffee break (Hall, ENSMM) | |
| 10:30 - 11:00 | Growth of crystalline III-V thin films using low-temperature plasma (Amphi E Chatelet, ENSMM) - Karim Ouaras - LPCIM |
|
| 11:00 - 11:30 | Dépôts de couches céramiques par projection thermique: procédés et applications (Amphi E Chatelet, ENSMM) - Vincent Rat - IRCER |
|
| 11:30 - 11:45 | Victor Vallejo-Otero - Laboratoire Hubert Curien (Amphi E Chatelet, ENSMM) - Nouveau procédé de micro-nanostructuration de couches de nitrure de titane (TiN) par la combinaison d'un sol-gel d'oxide de titane (TiO2) et d'un recuit rapide thermique (RTA) |
|
| 11:45 - 12:00 | Hamza Kellou (visio) - LPCM/LPCMC (Amphi E Chatelet, ENSMM) - Bismuth three oxyde Nanopowder to inhibit and photostabilize 2-Aminophenol |
|
| 12:00 - 12:30 | Matériaux 1D-2D par la méthode de dépôt LEGO (visio) (Amphi E Chatelet, ENSMM) - Paolo Bondavali - TRT |
|
| 12:30 - 14:00 | Lunch (Hall, ENSMM) | |
| 14:00 - 14:30 | The femtosecond laser at the service of society (Amphi E Chatelet, ENSMM) - Julien Granier - EIG Manutech USD |
|
| 14:30 - 15:00 | NEW French Nano-Imprint Lithography NETWORK and ressources (Amphi E Chatelet, ENSMM) - Céline Chevalier - INL - Renatech+ |
|
| 15:00 - 15:15 | Olha Sysova - IS2M (Amphi E Chatelet, ENSMM) - Water-soluble resist for deep-UV (193nm) photolithography based on a chitosan bio-polymer |
|
| 15:15 - 15:30 | Amani Ouirimi - LPL (Amphi E Chatelet, ENSMM) - Mixed-order distributed feed-back organic diode laser cavities: from the design to the characterization |
|
| 15:30 - 16:00 | Coffee break (Hall, ENSMM) | |
| 16:00 - 16:30 | In-situ device fabrication in Molecular Beam Epitaxy Cluster (Amphi E Chatelet, ENSMM) - Xin Guan - TUE |
|
| 16:30 - 16:45 | Sylwester Bargiel - FEMTO-ST (Amphi E Chatelet, ENSMM) - Femtosecond laser irradiation followed by chemical etching - Versatile method for fabrication of innovative 3D structures in glass materials |
|
| 16:45 - 17:00 | Feriel Laourine - GREMI (Amphi E Chatelet, ENSMM) - Stainless steel patterning at micrometric scale with ICP chlorinated plasma: Process optimization and understanding of etching mechanisms |
|
| 17:00 - 17:15 | Jean-Yves Rauch - FEMTO-ST (Hall, ENSMM) - Polyarticulated, light-activated structures made from origami of silica membranes, installed at the end of optical fibres |
|
| 17:15 - 17:30 | Sébastien Thibaud - SUPMICROTECH-ENSMM (Amphi E Chatelet, ENSMM) - De la micromécanique horlogère aux composants miniaturisés flexibles |
|
| 17:30 - 18:30 | Gala Dinner |
Friday, December 2, 2022
| Time | Event | (+) |
| 08:00 - 08:30 |
JNTE Day 3 Welcome (Hall, ENSMM) |
|
| 08:30 - 09:00 | The potential of 3D Plastronics: from packaging to ecofriendly innovative systems (Amphi E Chatelet, ENSMM) - Philippe Lombard - Ampere |
|
| 09:00 - 09:30 | Heterogeneous integration on silicon nitride for integrated photonics: lasers and nonlinear materials (Amphi E Chatelet, ENSMM) - Maximilien Billet - Ghent University |
|
| 09:30 - 09:45 | (canceled) Frédéric Zamkotsian - LAM (Amphi E Chatelet, ENSMM) - MOEMS for space applications: Micromirror arrays for Universe and Earth Observation |
|
| 09:45 - 10:00 | Jules Duraz - C2N (Amphi E Chatelet, ENSMM) - Fabrication and characterization techniques to study flexible micro light-emitting diodes with a millimetric radius of curvature |
|
| 10:00 - 10:30 | Coffee break (Hall, ENSMM) | |
| 10:30 - 11:00 | Flexiboard: CMOS-MEMS chiplet integration with soft materials towards autonomous programmable matter (Amphi E Chatelet, ENSMM) - Yoshio Mita - UTokyo, LIMMS |
|
| 11:00 - 11:30 | (canceled) Nanofabrication of topological insulators (Amphi E Chatelet, ENSMM) - Sébastien Plissard - LAAS | |
| 11:30 - 11:45 | Anne-Claire Eiler - UTokyo (Amphi E Chatelet, ENSMM) - Design and fabrication of an SOI-CMOS large-scale integrated circuit for bioelectrochemical sensing |
|
| 11:45 - 12:00 | Alain Bosseboeuf - C2N (Amphi E Chatelet, ENSMM) - Activation and gas sorption of Y-based getter films for wafer-level vacuum packaging of microsensors |
|
| 12:00 - 12:30 | 2D materials by chemical vapor deposition: from coupons to large area depositions (Amphi E Chatelet, ENSMM) - Vincent Astié - Annealsys |
|
| 12:30 - 12:45 | Conclusions (Amphi E Chatelet, ENSMM) | |
| 12:45 - 14:00 | Lunch (Hall, ENSMM) |
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