lundi 28 novembre 2022
| Heures | événement | (+) |
| 08:00 - 08:30 |
Ecole Micro-Nanotechnologie Jour 1 Café bienvenue |
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| 08:30 - 09:20 | Lithographie I (lithographie UV, écriture directe, masques) (Amphi JJ Gagnepain, FEMTO-ST) - Guillaume Jutzi, FEMTO-ST | |
| 09:20 - 10:10 | Lithographie II (lithographie à deux photons): MPO 100, a multi-user tool for 3D lithography and 3D microprinting (Amphi JJ Gagnepain, FEMTO-ST) - S. Kohlhaas, Heidelberg Instruments / Multiphoton Optics | |
| 10:10 - 10:30 | Pause café | |
| 10:30 - 11:20 | Gravure humide et RIE (Amphi JJ Gagnepain, FEMTO-ST) - Djaffar Belharet, FEMTO-ST | |
| 11:20 - 12:10 | Micro-structuration de verre (gravure humide et sèche, procédé laser femto seconde direct et assisté par gravure humide, micromoulage) (Amphi JJ Gagnepain, FEMTO-ST) - Sylwester Bargiel, FEMTO-ST | |
| 12:10 - 13:30 | Déjeuner | |
| 13:30 - 14:00 | Introduction salle blanche (Amphi JJ Gagnepain, FEMTO-ST) - Samuel Queste, FEMTO-ST | |
| 14:00 - 16:00 | Atelier I (Cleanroom MIMENTO) | |
| 16:00 - 18:00 | Atelier II (Cleanroom MIMENTO) |
mardi 29 novembre 2022
| Heures | événement | (+) |
| 08:00 - 08:30 |
Ecole de Micro-nanotechnologie Jour 2 Café |
|
| 08:30 - 09:20 | Polissage et qualité de surface (Amphi JJ Gagnepain, FEMTO-ST) - V. Menard, CImap ENSICaen | |
| 09:20 - 10:10 | Wafer bonding (activation de surface, collage moléculaire, anodique, thermo-compression) (Amphi JJ Gagnepain, FEMTO-ST) - Samuel Charlot, LAAS | |
| 10:10 - 10:30 | Pause café | |
| 10:30 - 11:20 | Croissance des couches minces (adhésion, cristallisation, contrôle d'orientation et taille des grains, contraintes) (Amphi JJ Gagnepain, FEMTO-ST) - Ausrine Bartasyte, FEMTO-ST | |
| 11:20 - 12:10 | Caractérisation des propriétés électriques DC (transport, résistivité, instrumentation, contact ohmique) et optiques (Amphi JJ Gagnepain, FEMTO-ST) - Samuel Margueron, FEMTO-ST | |
| 12:10 - 13:30 | Déjeuner | |
| 13:30 - 14:00 | (En option) Ellipsométrie (niveau avancé) (Amphi JJ Gagnepain, FEMTO-ST) - Samuel Margueron, FEMTO-ST | |
| 14:00 - 16:00 | Atelier III (Cleanroom MIMENTO) | |
| 16:00 - 18:00 | Atelier IV (Cleanroom MIMENTO) |
mercredi 30 novembre 2022
| Heures | événement | (+) |
| 08:00 - 08:45 |
JNTE Jour 1 Accueil - Enregistrement (Hall, ENSMM) |
|
| 08:45 - 09:00 | Ouverture (Amphi E Chatelet, ENSMM) - P. Vairac (SUPMICROTECH) / J.-L. Leclercq (INL) / A. Bartasyte (FEMTO-ST) | |
| 09:00 - 09:30 | Les programmes nationaux autour des nanotechnologies au CNRS (Amphi E Chatelet, ENSMM) - Isabelle Sagnes - INSIS CNRS | |
| 09:30 - 10:15 | Keynote Talk: 3D laser micro and nanoprinting (Amphi E Chatelet, ENSMM) - M. Wegener - KIT |
|
| 10:15 - 10:35 | Pause café (Hall, ENSMM) | |
| 10:35 - 11:05 | Plasmonic microcapsules for strain detection (visio) (Amphi E Chatelet, ENSMM) - Remi Dreyfus - LN2 |
|
| 11:05 - 11:35 | Self-assembly of DNA origamis for nanolithographic applications (Amphi E Chatelet, ENSMM) - Nicolas Triomphe - CBS |
|
| 11:35 - 12:30 | Session Flash Poster (Amphi E Chatelet, ENSMM) |
|
| 12:30 - 14:00 | Déjeuner (Hall, ENSMM) | |
| 14:00 - 14:30 | Fabrication of titanium MEMS (Amphi E Chatelet, ENSMM) - Gwenaël Bécan - MISTIC Technologies |
|
| 14:30 - 15:00 | How can nature help us find mechanical solutions ? (visio) (Amphi E Chatelet, ENSMM) - Jean-Marc Linares - ISM |
|
| 15:00 - 15:30 | Biomimetic organs-on-chip (Amphi E Chatelet, ENSMM) - Caterina Tomba - INL |
|
| 15:30 - 16:00 | Pause café (Hall, ENSMM) | |
| 16:00 - 16:30 | Microfluidic technologies for diagnostic applications (Amphi E Chatelet, ENSMM) - Karla Perez Toralla - CEA Saclay |
|
| 16:30 - 17:30 | Session exposant (Amphi E Chatelet, ENSMM) | |
| 17:30 - 19:00 | Session Poster / Dégustation de produits locaux (Fromage/vin) (Hall, ENSMM) |
|
jeudi 1 décembre 2022
| Heures | événement | (+) |
| 08:00 - 08:30 |
JNTE Jour 2 Accueil (Hall, ENSMM) |
|
| 08:30 - 09:00 | Réseaux Plateformes, EuroNanoLab et Renatech-projets (Amphi E Chatelet, ENSMM) - M. de Labachelerie, B. Lecha | |
| 09:00 - 09:30 | Filière Niobate de lithium en couches minces en France (Amphi E Chatelet, ENSMM) - Florent Doutre - INPHYNI |
|
| 09:30 - 09:45 | Johnny Moughames - FEMTO-ST (Amphi E Chatelet, ENSMM) - 3D Graytone Printing for Thermo-Mechanical and Optical Applications |
|
| 09:45 - 10:00 | Thierry Grosjean - FEMTO-ST (Amphi E Chatelet, ENSMM) - Fabrication of sub-micron 3D helical antennas by FIB induced deposition and GLAD for subwavelength polarization optics |
|
| 10:00 - 10:30 | Pause café (Hall, ENSMM) | |
| 10:30 - 11:00 | Growth of crystalline III-V thin films using low-temperature plasma (Amphi E Chatelet, ENSMM) - Karim Ouaras - LPCIM |
|
| 11:00 - 11:30 | Dépôts de couches céramiques par projection thermique: procédés et applications (Amphi E Chatelet, ENSMM) - Vincent Rat - IRCER |
|
| 11:30 - 11:45 | Victor Vallejo-Otero - Laboratoire Hubert Curien (Amphi E Chatelet, ENSMM) - Nouveau procédé de micro-nanostructuration de couches de nitrure de titane (TiN) par la combinaison d'un sol-gel d'oxide de titane (TiO2) et d'un recuit rapide thermique (RTA) |
|
| 11:45 - 12:00 | Hamza Kellou (visio) - LPCM/LPCMC (Amphi E Chatelet, ENSMM) - Bismuth three oxyde Nanopowder to inhibit and photostabilize 2-Aminophenol |
|
| 12:00 - 12:30 | Matériaux 1D-2D par la méthode de dépôt LEGO (visio) (Amphi E Chatelet, ENSMM) - Paolo Bondavali - TRT |
|
| 12:30 - 14:00 | Déjeuner (Hall, ENSMM) | |
| 14:00 - 14:30 | The femtosecond laser at the service of society (Amphi E Chatelet, ENSMM) - Julien Granier - EIG Manutech USD |
|
| 14:30 - 15:00 | NEW French Nano-Imprint Lithography NETWORK and ressources (Amphi E Chatelet, ENSMM) - Céline Chevalier - INL - Renatech+ |
|
| 15:00 - 15:15 | Olha Sysova - IS2M (Amphi E Chatelet, ENSMM) - Water-soluble resist for deep-UV (193nm) photolithography based on a chitosan bio-polymer |
|
| 15:15 - 15:30 | Amani Ouirimi - LPL (Amphi E Chatelet, ENSMM) - Mixed-order distributed feed-back organic diode laser cavities: from the design to the characterization |
|
| 15:30 - 16:00 | Pause café (Hall, ENSMM) | |
| 16:00 - 16:30 | In-situ device fabrication in Molecular Beam Epitaxy Cluster (Amphi E Chatelet, ENSMM) - Xin Guan - TUE |
|
| 16:30 - 16:45 | Sylwester Bargiel - FEMTO-ST (Amphi E Chatelet, ENSMM) - Femtosecond laser irradiation followed by chemical etching - Versatile method for fabrication of innovative 3D structures in glass materials |
|
| 16:45 - 17:00 | Feriel Laourine - GREMI (Amphi E Chatelet, ENSMM) - Stainless steel patterning at micrometric scale with ICP chlorinated plasma: Process optimization and understanding of etching mechanisms |
|
| 17:00 - 17:15 | Jean-Yves Rauch - FEMTO-ST (Hall, ENSMM) - Polyarticulated, light-activated structures made from origami of silica membranes, installed at the end of optical fibres |
|
| 17:15 - 17:30 | Sébastien Thibaud - SUPMICROTECH-ENSMM (Amphi E Chatelet, ENSMM) - De la micromécanique horlogère aux composants miniaturisés flexibles |
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| 17:30 - 18:30 | Départ Musée du Temps / Repas de Gala (Centre Diocésain Pierre de Grammont) |
vendredi 2 décembre 2022
| Heures | événement | (+) |
| 08:00 - 08:30 |
JNTE Jour 3 Accueil (Hall, ENSMM) |
|
| 08:30 - 09:00 | The potential of 3D Plastronics: from packaging to ecofriendly innovative systems (Amphi E Chatelet, ENSMM) - Philippe Lombard - Ampere |
|
| 09:00 - 09:30 | Heterogeneous integration on silicon nitride for integrated photonics: lasers and nonlinear materials (Amphi E Chatelet, ENSMM) - Maximilien Billet - Ghent University |
|
| 09:30 - 09:45 | (supprimé) Frédéric Zamkotsian - LAM (Amphi E Chatelet, ENSMM) - MOEMS for space applications: Micromirror arrays for Universe and Earth Observation |
|
| 09:45 - 10:00 | Jules Duraz - C2N (Amphi E Chatelet, ENSMM) - Fabrication and characterization techniques to study flexible micro light-emitting diodes with a millimetric radius of curvature |
|
| 10:00 - 10:30 | Pause café (Hall, ENSMM) | |
| 10:30 - 11:00 | Flexiboard: CMOS-MEMS chiplet integration with soft materials towards autonomous programmable matter (Amphi E Chatelet, ENSMM) - Yoshio Mita - UTokyo, LIMMS |
|
| 11:00 - 11:30 | (supprimé) Nanofabrication of topological insulators (Amphi E Chatelet, ENSMM) - Sébastien Plissard - LAAS | |
| 11:30 - 11:45 | Anne-Claire Eiler - UTokyo (Amphi E Chatelet, ENSMM) - Design and fabrication of an SOI-CMOS large-scale integrated circuit for bioelectrochemical sensing |
|
| 11:45 - 12:00 | Alain Bosseboeuf - C2N (Amphi E Chatelet, ENSMM) - Activation and gas sorption of Y-based getter films for wafer-level vacuum packaging of microsensors |
|
| 12:00 - 12:30 | 2D materials by chemical vapor deposition: from coupons to large area depositions (Amphi E Chatelet, ENSMM) - Vincent Astié - Annealsys |
|
| 12:30 - 12:45 | Conclusions (Amphi E Chatelet, ENSMM) | |
| 12:45 - 14:00 | Déjeuner (Hall, ENSMM) |
